The demand for high accuracy and robust gantries is met with IntelLIDrives newly designed XY gantry that addresses the unique needs of multitude of industries including semiconductor, medical, and military/aerospace. Very precise fine positioning and control is easily achieved with servo controllers compatible with EtherCAT, CANOpen, RS-232, USB, Ethernet/IP interfaces. These stages fitted with core-less linear motors for smooth scanning applications as well for fast index motions with fast settling time. High-resolution, non-contact 0.5 micron linear encoders offer exceptional repeatability and stability over a range of operating conditions. An optional Z axis can be motorized with linear motors or a precision ground ball screw drive.